JPH0244024B2 - - Google Patents

Info

Publication number
JPH0244024B2
JPH0244024B2 JP57142891A JP14289182A JPH0244024B2 JP H0244024 B2 JPH0244024 B2 JP H0244024B2 JP 57142891 A JP57142891 A JP 57142891A JP 14289182 A JP14289182 A JP 14289182A JP H0244024 B2 JPH0244024 B2 JP H0244024B2
Authority
JP
Japan
Prior art keywords
moisture
electrode
humidity
capacitance
humidity sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57142891A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5932857A (ja
Inventor
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP14289182A priority Critical patent/JPS5932857A/ja
Publication of JPS5932857A publication Critical patent/JPS5932857A/ja
Publication of JPH0244024B2 publication Critical patent/JPH0244024B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP14289182A 1982-08-17 1982-08-17 湿度センサ Granted JPS5932857A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14289182A JPS5932857A (ja) 1982-08-17 1982-08-17 湿度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14289182A JPS5932857A (ja) 1982-08-17 1982-08-17 湿度センサ

Publications (2)

Publication Number Publication Date
JPS5932857A JPS5932857A (ja) 1984-02-22
JPH0244024B2 true JPH0244024B2 (en]) 1990-10-02

Family

ID=15325991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14289182A Granted JPS5932857A (ja) 1982-08-17 1982-08-17 湿度センサ

Country Status (1)

Country Link
JP (1) JPS5932857A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2630836B2 (ja) * 1989-02-13 1997-07-16 三洋電機株式会社 半導体湿度センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2498329A1 (fr) * 1981-01-19 1982-07-23 Commissariat Energie Atomique Hygrometre capacitif a dielectrique mince et son procede de fabrication

Also Published As

Publication number Publication date
JPS5932857A (ja) 1984-02-22

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